RF Plasma Generator
 

RF Plasma Generator
Output: 3300 watt @ 2 MHz

(PS) NOVA-50A
MKS ENI Nova-50A RF plasma generator. 3300 watt output at 2 MHz. Frequency stability ±0.0005%. Output regulation <2% at set point. Unlimited load impedance range. Automatic load mismatch protection.

Water cooled requires 2.0 gallon / minute. 5 - 35ºC. Accepts 3/8" NPT male pipe. Digital readout displays frequency, forward, reflected and load power. Remote interface connection. Requires 208v, 3 phase power. 32 amp. Weighs 91 lbs. Serial #CR176. Software version 1.6. Dimensions: 8-3/4" x 19" x 22". New, unused.

 
 
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